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 | Computer operation guarantees identical process parameters from run to run. |
| Data logging for every automatic run (event driven). |
| Store limitless number of recipes (.rcp files). |
| Chambers available in Anodized Aluminum or Stainless Steel. |
| Water cooled electrode, chamber and baseplate. |
| Add purging cycles if you wish. |
| + or - 5% uniformity guarantee. |
| Process support available. |
| System includes direct drive mechanical pump (14 cfm) with all connecting fittings. |
| Choice of high frequency (13.56 MHz) or low frequency(40 KHz) power supplies. |
| Options: Down Stream Pressure Control, Turbo Pumping, Scrubber, Oil Filtration and Floor Model Cabinets. |
| Description | MODEL # |
|---|---|
| 12" Al. Chamber, w/2 AFC's , Low Freq. RF | PETS-PE-A12-2-LF |
| 12" Al. Chamber, w/4 AFC's , Low Freq. RF | PETS-PE-A12-4-LF |
| 12" SS Chamber, w/2 AFC's, Low Freq. RF | PETS-PE-SS12-2-LF |
| 12" SS Chamber, w/4 AFC's , Low Freq. RF | PETS-PE-SS12-4-LF |
| 16" Al. Chamber, w/2 AFC's , Low Freq. RF | PETS-PE-A16-2-LF |
| 16" Al. Chamber, w/4 AFC's, Low Freq. RF | PETS-PE-A16-4-LF |
| 16" SS Chamber, w/2 AFC's, Low Freq. RF | PETS-PE-SS16-2-LF |
| 16" SS Chamber, w/4 AFC's, Low Freq. RF | PETS-PE-SS16-4-LF |
| 12" Al. Chamber, w/2 AFC's , High Freq. RF | PETS-PE-A12-2-HF |
| 12" Al. Chamber, w/4 AFC's , High Freq. RF | PETS-PE-A12-4-HF |
| 12" SS Chamber, w/2 AFC's, High Freq. RF | PETS-PE-SS12-2-HF |
| 12" SS Chamber, w/4 AFC's , High Freq. RF | PETS-PE-SS12-4-HF |
| 16" Al. Chamber, w/2 AFC's , High Freq. RF | PETS-PE-A16-2-HF |
| 16" Al. Chamber, w/4 AFC's, High Freq. RF | PETS-PE-A16-4-HF |
| 16" SS Chamber, w/2 AFC's, High Freq. RF | PETS-PE-SS16-2-HF |
| 16" SS Chamber, w/4 AFC's, High Freq. RF | PETS-PE-SS16-4-HF |
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