.

DOWNLOADABLE INFORMATION

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    and down load these files.

        SYSTEM DATA SHEETS

                RIE SYSTEMS

                riex164hf.pdf    riex164hf-fm.pdf    riex164lf.pdf

                riex164lf-fm.pdf

              PECVD SYSTEMS

                pecvdx164hf.pdf    pecvdx164hf-fm.pdf

                pecvdx164lf.pdf     pecvdx164lf-fm.pdf

              ION MILLING SYSTEMS

                im8ionmill.pdf

        TECHNICAL INFORMATION

                WHAT IS PLASMA 121399.pdf

                WHAT IS PECVD.pdf

                Color Chart.pdf

                Sputter Rates.pdf

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Last modified: September 10, 2005